300 mm Wafer Inspection System Used in Class 1 Clean Room

300mm Wafer Inspection System Simple packaging design with Class 1 Mini-environment built in provides easy access and low maintenance.

Benefits and Features:

Simplified power distribution
State-of-the-art wafer transfer system with new chuck design for 300mm wafers eliminates need for separate aligner
Robot mechanisms and electronics are fully integrated into the system
Fan/Filter Unit integrated into the system
Front End integration