MEMS Processing Machine in Vacuum

Laser Cutting SystemTypical of the systems DEVPROTEK has developed for our customers is this automated MEMS processing machine, which provides complete operation of all processing functions in a vacuum environment.

Benefits and Features:

  • A total of ten axes of motion for automatic operation and configuration
  • Six axes of motion in the vacuum environment
  • Semi-automatic material loading and unloading mechanism
  • Machine vision and laser ranging for parts inspection, calibration, and setup
  • Real-time vision closed-loop feedback
  • Programmable processing head with precision
    force control in vacuum